Cyclized Copolymer of Methacrylic Anhydride and an Application to Photoresist with Photo-Acid Generator.
نویسندگان
چکیده
منابع مشابه
Cyclized Copolymer of Methacrylic Anhydride and an Application to Photoresist with Photo-Acid Generator
The cyclized copolymerization of methacrylic anhydride with N phenyldimethacrylamide and methacrylonitrile was carried out. The polymer consists of six-membered cyclic acid anhydride and five-membered imide ring. The cyclic acid anhydride was hydrolyzed by generated acid catalyst from photo-acid generator (PAG). The hydrolyzed copolymer is dissolved in an alkaline solution. We applied this copo...
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ژورنال
عنوان ژورنال: Journal of Photopolymer Science and Technology
سال: 1999
ISSN: 0914-9244,1349-6336
DOI: 10.2494/photopolymer.12.769